JPH0230659Y2 - - Google Patents
Info
- Publication number
- JPH0230659Y2 JPH0230659Y2 JP3064385U JP3064385U JPH0230659Y2 JP H0230659 Y2 JPH0230659 Y2 JP H0230659Y2 JP 3064385 U JP3064385 U JP 3064385U JP 3064385 U JP3064385 U JP 3064385U JP H0230659 Y2 JPH0230659 Y2 JP H0230659Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- guide plate
- cleaning area
- clean
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 20
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000003570 air Substances 0.000 description 56
- 238000005259 measurement Methods 0.000 description 11
- 230000003749 cleanliness Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004887 air purification Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3064385U JPH0230659Y2 (en]) | 1985-03-04 | 1985-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3064385U JPH0230659Y2 (en]) | 1985-03-04 | 1985-03-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61149029U JPS61149029U (en]) | 1986-09-13 |
| JPH0230659Y2 true JPH0230659Y2 (en]) | 1990-08-17 |
Family
ID=30530527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3064385U Expired JPH0230659Y2 (en]) | 1985-03-04 | 1985-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230659Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4513275B2 (ja) * | 2002-05-07 | 2010-07-28 | セイコーエプソン株式会社 | 清浄作業台 |
-
1985
- 1985-03-04 JP JP3064385U patent/JPH0230659Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61149029U (en]) | 1986-09-13 |
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